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Products
Spare parts for Dry Etch, CVD, and LCD toolsets
AceCo manufactures over 1,700 components for 150, 200, and 300mm Dry Etch and CVD toolsets used in the Semiconductor industry. In addition, AceCo supplies components for up to 9th generation equipment used in the LCD and Solar industries.
High Vacuum Isolation/Throttling Valves
AceCo repairs, refurbishes, and cleans a variety of high vacuum valves and throttle valves for the semiconductor and LCD industries. These include chamber isolation, load lock isolation, pendulum and pressure proportioning control valves. Systems supported include CKD,HVA,MKS,Norcal,SMC and VAT.
Heater Pedestals
AceCo refurbishes heater pedestals for semiconductor thin films toolsets. Original equipment manufacturers equipment supported include Applied Materials, ASM and Novellus.
Photolithography Track Hot and Chill Plates
AceCo repairs, cleans and refurbishes hot and chill plates from DNS and TEL.
Ferrofluidic Seals
AceCo repairs and refurbishes ferro fluid based rotational seals for the semiconductor industry. Manufacturers supported include Kokusai and TEL.
Electro-Mechanical Assembly Repair Services
AceCo repairs, refurbishes and cleans a variety of electro-mechanical assemblies to include: wafer handling robots, transfer systems and servo/stepper motor drives and systems.